Atomic layer deposition of low-dimensional transition metal di

As mentioned above, the Cu-S molecular inks display a transparent brownish color without any obvious sedimentation. ... Tetrakis(dimethylamido)titanium. (TDMAT) ...







when Colloidal Chemistry meets Atomic Layer Deposition
Term. Meaning. Standard(s). %F.S. percent full scale. SEMI E77, SEMI E80. '->' indicates a mapping of an argument to its contents or its meaning. SEMI P39.
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Figure 2.3.: TGA of the four Ti compounds TDMAT (4), TDMAGT (10) ... false color scale in (d) is different for better visibility.
Plasma-enhanced atomic layer deposition of binary metal oxides as ...
... Ti was present only in the Ti4+ state with TDMAT plasma (TD-P) at 458.9 eV and TTIP plasma (TT-P) at 459.2 eV which are consistent with ...



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